Products

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Industry Focused Products!

The Marathon 8500 is an advanced, point-of-use, integrated burn/wet treatment system designed to provide a controlled gas conditioning environment for today’s demanding semiconductor and flat panel display process chemistries.

The Guardian systems are designed to thermally oxidize spent process gases using active flame oxidation. The effluent gases pass through a wall of flame in the main chamber, guaranteeing ignition of flammable and pyrophoric process gas by–products.

The Vector is a proven solution for a variety of processes including Etch and Epi. An extensive database of applications and removal efficiencies is used to customize the best solution for a given process.

The CD series is an advanced point–of–use integrated thermal-wet treatment system designed to provide a controlled gas conditioning environment for today’s demanding semiconductor process chemistries.