V91 is a wet abatement system. It is designed to pass the effluent gases through the primary and secondary scrubbing, effectively removing water-soluble harmful substances while greatly improving the washing efficiency.
V91 meets the industry standard for controlled decomposition greenhouse gases.
- Water soluble gases
- AsH3, PH3
- Flat panel display
- Multi stages scrubbing
- High flow capacity
- Reduced water consumption
- Recirculating water system
- Low cost of ownership
- Ease of installation and services
- Inlet pressure control and self-cleaning mechanisms
- SEMI S2 compliance, CE marked
- Ethernet ready