Vector V91

V91 is a wet abatement system. It is designed to pass the effluent gases through the primary and secondary scrubbing, effectively removing water-soluble harmful substances while greatly improving the washing efficiency.

V91 meets the industry standard for controlled decomposition greenhouse gases.


  • Epitaxy
  • Water soluble gases
  • AsH3, PH3
  • Flat panel display 


  • Multi stages scrubbing
  • High flow capacity
  • Reduced water consumption
  • Recirculating water system
  • Low cost of ownership
  • Ease of installation and services
  • Inlet pressure control and self-cleaning mechanisms
  • SEMI S2 compliance, CE marked
  • Ethernet ready