M91A is the first of its kind plasma gasification and wet abatement system that consumes very low power to break the highly stable materials like fluorinated compounds into smaller molecules.

M91A is developed and tested as a point-of-use abatement system to treat PFCs loaded gases that are mainly found in today’s demanding semiconductor and flat panel display process chemical industries.

M91A meets the industry standard for controlled decomposition and oxidation treatment of fluorinated greenhouse gases.


  •  All semiconductor & flat panel displays 


  • Low power consumption
  • Excellent PFCs abatement efficiency
  • Limited NOx and COx emission
  • High flow capacity
  • Low cost of ownership
  • Ease of installation and services
  • SEMI S2 compliance, CE marked
  • Ethernet ready