Marathon m91

M91 is industry standard for reliable, integrated combustion & wet abatement system.

M91 is designed to have the effluent gases pass through the wall of flame in the main chamber, guaranteeing ignition of flammable and pyrophoric process gas before going through the wet scrubbing system to get rid of the water-soluble harmful substances.


  • Polysilicon
  • CVD
  • Pyrophoric/flammable gas combustion
  • Gas cabinet vent purge


  • Low power consumption
  • Limited NOx and CO emission
  • High flow capacity 
  • Reduced water consumption and recirculating water system
  • Low cost of ownership
  • Ease of installation and services
  • SEMI S2 compliance, CE marked
  • Ethernet ready