mARAHTON M91U
M91AU is the first of its kind plasma gasification and wet abatement system that consumes as little as 7kW to break the highly stable materials like fluorinated compounds into smaller molecules.
Combustion decomposition can be achieved without using fuel or hydrogen thanks to the plasma torch of M91AU that focuses high-energy electron to the targeted gas to break them down into smaller molecules.
Application
- Polysilicon
- CVD
- Pyrophoric/flammable gas combustion
- Gas cabinet vent purge
Advantages
- Dual reactor
- Fault-Tolerant Capability
- Low power consumption
- Limited NOx and CO emission
- High flow capacity
- Reduced water consumption and recirculating water system
- Low cost of ownership
- Ease of installation and services
- SEMI S2 compliance, CE marked
- Ethernet ready
