Marathon (Combustion/wet)


The Marathon is our flagship product and can be used for all process types.

This high capacity unit, can be connected to 6 individual process chambers, and offers abatement to >99.9% DRE on PFC gases without the requirement for a separate oxygen supply.


  • All semiconductor, solar & flat panel display fabrication


  • Excellent PFC abatement efficiency to >99%
  • Limited NOx and CO emissions
  • Superior Particulate management technology
  • High flow capacity up to 700 slm of process gas
  • Very low freshwater consumption
  • Low cost of ownership
  • Ease of installation and servicing
  • Third party certification, SEMI S2, CE