Vector (wet scrubber)

About

The Vector abatement system defines the state-of-the-art in safe, effective, and economical abatement of toxic, corrosive, water reactive gases from process equipment gaseous effluent.

With several different models and entry types, the Vector is a proven solution for abatement in a variety of processes including EPI,  Etch and even SiN. An extensive database of applications and removal efficiencies is used to customize the best solution for a given process type. 

Applications

  • Vector 3000
    • Etch
    • Tungsten CVD
    • Expitaxy
  • Vector 3500
    • Metal Etch
  • Vector 6000
    • Silicon Nitride

Options

  • Safety containment cage
  • Chemical Injection
  • Simple Remote