Marathon m91AU

M91AU is the first of its kind plasma gasification and wet abatement system that consumes as little as 7kW to break the highly stable materials like fluorinated compounds into smaller molecules.

Combustion decomposition can be achieved without using fuel or hydrogen thanks to the plasma torch of M91AU that focuses high-energy electron to the targeted gas to break them down into smaller molecules.

Application

  • All semiconductor and flat panel display

Advantages

  • 3 inlets per reactor
  • Dual reactors
  • Fault-tolerant design
  • Does not required fuel or hydrogen
  • Low power consumption
  • Excellent PFCs abatement efficiency
  • Limited NOx and CO emission
  • High flow capacity
  • Low cost of ownership
  • Ease of installation and services
  • SEMI S2 compliance, CE marked