mARATHON m91pd
M91PD is industry standard for reliable, plasma integrated combustion & wet abatement system with dual reactors.
M91PD is designed with a focus on abatement efficiency and MTBS. The multiple slanted torches design of the M91 and M91D generate a heat zone that maximizes the combustion deposition. The wet wall section prevents formation of by-product powder around the reactor,, which also reduces inlet clogging.
Applications
- Polysilicon
- CVD
- Pyrophoric/flammable gas combustion
- Gas cabinet vent purge
Advantages
- Dual-reactor
- Fail-safe capability
- Low power consumption
- Low cost of ownership
- Increased processing capacity
- Increased abatement efficiency
- Increased MTBS
