CDO C91
C91 is an advanced integrated thermal-wet abatement system and is designed to provide a controlled gas treatment environment for today’s demanding semiconductor, LED and flat panel display process chemistry.
C91 uses multiple heating rods with a fault-tolerant system to reduce system downtime. Heaters are evenly spaced in the reaction chamber to ensure that process gas is well decomposed.
Applications
- Polysilicon
- CVD
- Pyrophoric/flammable gas combustion
- Gas cabinet vent purge
Advantages
- Fault-tolerance heater design
- Sedimentation compartment
- Particles separation system
- Limited NOx and CO emission
- Low water consumption and recirculating water system
- Ease of use and maintenance
- Optional accessories available
- Third party certified, SEMI S2 compliance, CE marked
- Ethernet ready
