Marathon 8500/8600

The Marathon 8500/8600 is an advanced, point-of-use, integrated burn/wet treatment system designed to provide a controlled gas conditioning environment for today’s demanding semiconductor and flat panel display process chemistries.

The Marathon is our flagship product and can be used for all process types.

This high capacity unit, can be connected to 6 individual process chambers, and offers abatement to >99.9% DRE on PFC gases without the requirement for a separate oxygen supply.

Applications

  • All semiconductor and flat panel display  

Advantages

  • Excellent PFC abatement efficiency to >99%
  • Limited NOx and CO emissions
  • Superior Particulate management technology
  • High flow capacity up to 700 slm of process gas
  • Very low freshwater consumption
  • Low cost of ownership
  • Ease of installation and servicing
  • Third party certification, SEMI S2, CE
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