Vector 3000/3500/6000

The Vector is a proven solution for a variety of processes including Etch and Epi. An extensive database of applications and removal efficiencies is used to customize the best solution for a given process.

The Vector abatement system defines the state-of-the-art in safe, effective, and economical abatement of toxic, corrosive, water reactive gases from process equipment gaseous effluent.

With several different models and entry types, the Vector is a proven solution for abatement in a variety of processes including EPI,  Etch and even SiN. An extensive database of applications and removal efficiencies is used to customize the best solution for a given process type.