With several different models and entry types, the Vector is a proven solution for abatement in a veriety of processes including EPI, Etch and even SiN. An extensive database of applications and removal efficiencies is used to customise the best solution for a given process type.
Applications
- Vector 3000
- Epitaxy
- Etch
- Tungsten CVD
- Vector 3500
- Metal Etch
- Vector 6000
- Silicon Nitride
Options
- Safety containment cage
- Chemical Injection
- Simple Remote