Marathon   CDO   Guardian    Vector

With several different models and entry types, the Vector is a proven solution for abatement in a veriety of processes including EPI,  Etch and even SiN. An extensive database of applications and removal efficiencies is used to customise the best solution for a given process type.

Applications

  • Vector 3000Vector
    • Epitaxy
    • Etch
    • Tungsten CVD
  • Vector 3500
    • Metal Etch
  • Vector 6000
    • Silicon Nitride

Options

  • Safety containment cage
  • Chemical Injection
  • Simple Remote