The Marathon is our flagship product and can be used for all process types.
This high capacity unit, can be connected to 6 individual process chambers, and offers abatement to >99.9% DRE on PFC gases without the requirement for a seperate oxygen supply.
Applications
- All semiconductor, solar & flat panel display fabrication
Advantages
- Excellent PFC abatement efficiency to >99%
- Limited NOx and CO emissions
- Superior Particulate management technology
- High flow capacity up to 700 slm of process gas
- Very low freshwater consumption
- Low cost of ownership
- Ease of installation and servicing
- Third party certification, SEMI S2, CE